CASNo.
Formula
Abbr.
Assay
Meatal Purity
7782-50-5
Cl₂
Cl₂
99.99%-99.999%
7N-8N
CASNo.
Formula
Abbr.
Assay
Meatal Purity
10026-04-7
SiCl₄
STC
99%~99.9999%
6N-11N
Hexachlorodisilane Hexachlorodisilane
CASNo.
Formula
Abbr.
Assay
Meatal Purity
13465-77-5
Si₂Cl₆
HCDS
99.5%~99.99%
6N-8N
Tetraethyl orthosilicate Tetraethyl Orthosilicate
CASNo.
Formula
Abbr.
Assay
Meatal Purity
78-10-4
(C: c: hp. HÃ HÃ HÃ)
TEOS
99.9%~99.999%
6N-9N
CASNo.
Formula
Abbr.
Assay
Meatal Purity
7550-45-0
TiCl₄
TiC
99.9%~99.999%
6N-9N
CASNo.
Formula
Abbr.
Assay
Meatal Purity
10038-98-9
GeCl₄
GeC
99.9%~99.9999%
6N-9N
Trichlorosilane Trichlorosilane
CASNo.
Formula
Abbr.
Assay
Meatal Purity
10025-78-2
Cl₃HSi
TCS
99%~99.9999%
6N-9N
CASNo.
Formula
Abbr.
Assay
Meatal Purity
10294-34-5
BCl₃
TCB
99.9%~99.999%
6N-8N
Methyl trichlorosilane (monomethyl) Methyltrichlorosilane
CASNo.
Formula
Abbr.
Assay
Meatal Purity
75-79-6
CH₃CI₃Si
MTCS/MTS
99.9%~99.99%
6N-7N
Dimethyl dichlorosilane (dimethyl) Dichlorodimethylsilane
CASNo.
Formula
Abbr.
Assay
Meatal Purity
75-78-5
(CH3)2CI2Si
DCDMS
99.9%~99.99%
6N-7N
Trimethylchlorosilane (trimethylsilane) Trimethylchlorosilane
CASNo.
Formula
Abbr.
Assay
Meatal Purity
75-77-4
(CH₃)₃CISi
TMCS
99.9%~99.99%
6N-7N
Carbon Tetrafluoride Carbon tetrafluoride
CASNo.
Formula
Abbr.
Assay
Meatal Purity
75-73-0
CF₄
FC-14R-14
99.9%~99.9995%
6N-8N